The oxygen radicals produced in the plasma generate CO, CO 2, and H 2 O by reacting with carbon compounds, and these generated byproducts are eliminated from the instrument. As per quantum chemistry ...

In this interview AZoM speaks to Ron Vane, founder of XEI Scientific, about the 20th anniversary of Evactron plasma cleaning in electron microscopes. I used to work for Hitachi Instruments doing SEM ...

This method has increased in popularity, overtaking traditional surface cleaning methods due to its capacity to be seamlessly integrated into existing in-line processes without adding time or extra ...

Compact electron probes with large beam currents are required to achieve such precision. Routine production at the nanoscale requires immaculate and regulated surfaces to get the appropriate ...

Extending AE’s leadership in process power, this new line of Remote Plasma Sources delivers reliable performance at a broad range of flow rates, increasing productivity in semiconductor process ...